Kinetic Monte Carlo simulations of self organized nanostructures on Ta Surface Fabricated by Low Energy Ion Sputtering

摘要

Surfaces bombarded with low energy ion beams often display development ofself assembled patterns and quasi-periodic structures. Kinetic Monte Carlosimulations have been performed to describe ion sputtered Tantalum surfaces. Aweak nonlinearity in the relaxation process has been introduced and the resultsshow that the Positive Schwoebel barrier, produced by the nonlinearHamiltonian, is necessary in describing ion bombarded Tantalum surfaces.Furthermore, their scaling exponents suggest presence of a class other thanKPZ.